32

Role of hydroxyl groups in the formation of defect configurations in silicon devices

Year:
2008
Language:
english
File:
PDF, 343 KB
english, 2008
38

SiC-Like Phase and Room-Temperature Photoluminescence of Low-K SiOCH Films

Year:
2002
Language:
english
File:
PDF, 165 KB
english, 2002